Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles
Year: 2000
Type: article
Source: Thin Solid Films
Authors: J.D Ferguson, A.W Weimer, S.M George
Institution: University of Colorado Boulder
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Office of Naval Research
OpenAlex ID: W2054197529