Work

System and process enhancements of the Applied Materials Precision Implant 9200

Year: 1991

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/0168-583x(91)96210-c

Authors: P.R. Jaffe, K.P. Fairbairn

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2054281803

FWCI:

Cites: 3

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Related to: 10