Work

Is the Liquid Phase a Viable Approach for Bulk Growth of 3C-SiC?

Year: 2010

Type: article

Abstract: Despite outstanding properties, the development of 3C-SiC electronics is still suffering from the lack of bulk 3C-SiC substrates. Up to now, there is no real seed and optimized growth processes for this material. We address in this work the bulk growth of 3C-SiC by a two-step-liquid phase approach. By coupling experiments with global process simulation, we address the problems that must be overcome to consider the solution growth technique as a possible approach for the growth of bulk 3C-SiC.

Source: Materials science forum

DOI: 10.4028/www.scientific.net/msf.645-648.67

Authors: Frédéric Mercier, Olivier Kim-Hak, Jean Lorenzzi, Jean Marc Dedulle, Gabriel Ferro, Didier Chaussende

Institutions: National Institute of Advanced Industrial Science and Technology, Lyon 1 Université, Institut polytechnique de Grenoble, Centre National de la Recherche Scientifique, Université Joseph Fourier, Université de Lyon, Micro and Nanotechnology Innovation Centre

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

OpenAlex ID: W2054380297

FWCI: 1.261

Cites: 7

Cited by: 6

Related to: 10