Multicolor, visible-light nanolithography
Year: 2015
Type: conference-paper
DOI: 10.1117/12.2087107
Authors: John T. Fourkas, Zuleykhan Tomova
Institution: University of Maryland, College Park
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2054801026