Single-Step Optical Lift-Off Process
Year: 1980
Type: article
DOI: 10.1147/rd.244.0452
Authors: M. Hatzakis, B. J. Canavello, J. M. Shaw
Institution: IBM Research - Thomas J. Watson Research Center
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2055816327