Work

Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers

Year: 1997

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.284484

Authors: Manfred Weck, Joachim Huemmler, Bernd Petersen

Institution: Fraunhofer-Gesellschaft

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2056269592

FWCI: 1.289

Cites:

Cited by: 15

Related to: 10