Work

An apparatus for supersonic jet epitaxy of thin films

Year: 2000

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/1.1150484

Authors: S. A. Ustin, K. A. Brown, W. Ho

Institution: Cornell University

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Office of Naval Research, Air Force Office of Scientific Research

OpenAlex ID: W2057000614

FWCI: 1.297

Cites: 32

Cited by: 3

Related to: 10