Work

Features of polyatomic ion emission under sputtering of a silicon single crystal by Au− cluster ions

Year: 2003

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/s0168-583x(02)02200-0

Authors: Sh. Akhunov, S.N. Morozov, U.Kh. Rasulev

Institution: Academy of Sciences Republic of Uzbekistan

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2058216658

FWCI: 1.564

Cites: 10

Cited by: 14

Related to: 10