Work

Correlation between particle defects and electrical faults determined with laser scattering systems and digital measurements on checkerboard test structures

Year: 1996

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.250853

Authors: Christopher Hess, Larg H. Weiland, Guenter Lau, Rainer Hiller

Institution: Karlsruhe Institute of Technology

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2058526454

FWCI: 1.451

Cites: 7

Cited by: 3

Related to: 10