Work

Empirical model for dielectric charging in double-SOI-wafer-bonded CMUTs: Theory and experiment

Year: 2011

Type: conference-paper

Source: IEEE International Ultrasonics Symposium

DOI: 10.1109/ultsym.2011.0084

Authors: Wei Zheng, Douglas Barlage, Peiyu Zhang, Glen Fitzpatrick, Walied Moussa, Roger Zemp

Institutions: University of Alberta, Micralyne

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2059379591

FWCI: 1.448

Cites: 10

Cited by: 4

Related to: 10