Dynamics of CMOS-based thermally actuated cantilever arrays for force microscopy
Year: 2004
Type: article
Source: Sensors and Actuators A Physical
Authors: T. Volden, M. Zimmermann, D. Lange, O. Brand, H. Baltes
Institution: ETH Zurich
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2059597193