Dimensional considerations in achieving large quality factors for resonant silicon cantilevers in air
Year: 2009
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.3062204
Authors: Kianoush Naeli, Oliver Brand
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W2059618414