AirJet paper mover: an example of mesoscale MEMS
Year: 2000
Type: conference-paper
DOI: 10.1117/12.395620
Authors: David K. Biegelsen, Andrew A. Berlin, Patrick Cheung, Markus P. Fromherz, David Goldberg, Warren B. Jackson, Bryan Preas, James Reich, Lars E. Swartz
Institution: Palo Alto Research Center
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2060433466