Work

Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates

Year: 1996

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/1.1147074

Authors: Gang Jin, Roger Jansson, Hans Arwin

Institution: Linköping University

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2060629825

FWCI: 0.663

Cites: 14

Cited by: 196

Related to: 10