On the Doping Dependence of Oxidation‐Induced Stacking Fault Shrinkage in Silicon
Year: 1982
Type: article
DOI: 10.1149/1.2123502
Authors: R. B. Fair, A. Carim
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2060824683
