Work

Piezoelectric properties of polycrystalline AlN thin films for MEMS application

Year: 2006

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2006.03.001

Authors: K. Tonisch, V. Cimalla, Ch. Foerster, H. Romanus, O. Ambacher, D. Dontsov

Institution: Technische Universität Ilmenau

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2061352219

FWCI: 8.411

Cites: 16

Cited by: 220

Related to: 8