Work

An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement

Year: 2013

Type: conference-paper

Source: International Conference on Optical MEMS and Nanophotonics

DOI: 10.1109/omn.2013.6659035

Authors: Xiaoyang Zhang, Lin Liu, Wenxuan Liang, Xingde Li, Huikai Xie

Institutions: University of Florida, Johns Hopkins University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2061813847

FWCI: 0.406

Cites: 5

Cited by: 5

Related to: 10