Electrical properties of La2O3 thin films grown on TiN/Si substrates via atomic layer deposition
Year: 2005
Type: article
Source: Applied Surface Science
Authors: Nam Kyun Park, Dong Kyun Kang, Byong-Ho Kim, Sang Jin Jo, Jeong Sook Ha
Institution: Korea University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Korea University
OpenAlex ID: W2062079688