Spatially averaged (global) model of time modulated high density argon plasmas
Year: 1995
Type: article
DOI: 10.1116/1.579494
Authors: Sumio Ashida, C. Lee, M. A. Lieberman
Institution: University of California, Berkeley
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W2062660564