Work

Bimaterial microcantilevers with black silicon nanocone arrays

Year: 2013

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2013.05.007

Authors: Beomjin Kwon, Jing Jiang, Matthew V. Schulmerich, Zhida Xu, Rohit Bhargava, Gang Logan Liu, William P. King

Institutions: University of Illinois Urbana-Champaign, Cancer Center at Illinois

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Air Force Office of Scientific Research

OpenAlex ID: W2063005498

FWCI: 1

Cites: 35

Cited by: 12

Related to: 10