Computer-aided design tools for plasma etchers
Year: 1993
Type: conference-paper
DOI: 10.1117/12.142918
Authors: W. N. G. Hitchon, E. R. Keiter, K. M. Kramer
Institution: University of Wisconsin–Madison
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2063227955