Work

A large displacement, high frequency, underwater microelectromechanical systems actuator

Year: 2015

Type: article

Abstract: Here, we demonstrate an in situ electrostatic actuator that can operate underwater across a wide range of displacements and frequencies, achieving a displacement of approximately 10 μm at 500 Hz and 1 μm at 5 kHz; this performance surpasses that of existing underwater physical actuators. To attain these large displacements at such high speeds, we optimized critical design parameters using a computationally efficient description of the physics of low quality (Q) factor underwater electrostatic actuators. Our theoretical model accurately predicts actuator motion profiles as well as limits of bandwidth and displacement.

Source: Journal of Applied Physics

DOI: 10.1063/1.4905385

Authors: David J. Hoelzle, Clara K. Chan, Michael B. Scott, Melinda A. Lake, Amy C. Rowat

Institutions: University of Notre Dame, University of California, Los Angeles, UCLA Jonsson Comprehensive Cancer Center

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: National Science Foundation, University of Notre Dame, Jonsson Comprehensive Cancer Center

Award: CAREER: Mechanotyping Platform for Studies of Soft Biological Matter