Work

Characterization of vapor deposited thin silane films on silicon substrates for biomedical microdevices

Year: 2002

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/s0257-8972(02)00019-1

Authors: Ketul C. Popat, Robert W. Johnson, Tejal A. Desai

Institutions: University of Illinois Chicago, Abbott (United States), Boston University

Language: English

Topic: Polymer Surface Interaction Studies

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2063476913

FWCI: 3.057

Cites: 9

Cited by: 57

Related to: 10