Work

Surface adhesion and demolding force dependence on resist composition in ultraviolet nanoimprint lithography

Year: 2011

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2011.09.090

Authors: Alborz Amirsadeghi, Jae Jong Lee, Sunggook Park

Institutions: Louisiana State University, Korea Institute of Machinery & Materials

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2063527592

FWCI: 3.234

Cites: 28

Cited by: 56

Related to: 10