Work

Progress in CMOS integrated measurement systems

Year: 1999

Type: article

Source: IEEE Aerospace and Electronic Systems Magazine

DOI: 10.1109/62.799626

Authors: H. Baltes, O. Brand

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Eidgenössische Technische Hochschule Zürich, China Aerospace Science and Technology Corporation

OpenAlex ID: W2064004244

FWCI: 0.444

Cites: 8

Cited by: 5

Related to: 10