Work

Deposition of palladium films by a novel supercritical fluid transport-chemical deposition process

Year: 1991

Type: article

Source: Materials Research Bulletin

DOI: 10.1016/0025-5408(91)90118-6

Authors: Brooks M. Hybertson, Brian N. Hansen, Robert M. Barkley, Robert E. Sievers

Institutions: Cooperative Institute for Research in Environmental Sciences, University of Colorado Boulder

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2064150269

FWCI: 0.464

Cites: 25

Cited by: 32

Related to: 10