Work

Comparison of CrAlN layers obtained with one (CrAl) or two targets (Cr and Al) by magnetron sputtering

Year: 2011

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2011.11.049

Authors: C. Nouveau, B. Tlili, H. Aknouche, Y. Benlatreche, B. Patel

Institutions: Arts et Métiers, Laboratoire Bourguignon des Matériaux et Procédés, National Engineering School of Tunis, University of Boumerdes, Centre National de la Recherche Scientifique

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funder: Conseil régional de Bourgogne-Franche-Comté

OpenAlex ID: W2064317201

FWCI: 1.931

Cites: 29

Cited by: 22

Related to: 10