Work

Characterization of 0.5 MHz Silicon-Based Ultrasonic Nozzles Using Multiple Fourier Horns

Year: 2003

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-782-a3.5

Authors: Shirley C. Tsai, Yu L. Song, Yuan F. Chou, Terry K. Tseng, W. J. Chen, J. H. Yang, J. W. Chen, Chen S. Tsai

Institutions: California State University, Long Beach, National Taiwan University, Research Center for Applied Science, Academia Sinica, Academia Sinica, Chang Gung University, University of California, Irvine

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Council

OpenAlex ID: W2065285698

FWCI:

Cites: 4

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Related to: 10