Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators
Year: 2007
Type: article
Authors: Kam K. Leang, Santosh Devasia
Institutions: Virginia Commonwealth University, University of Washington
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2065325399