Helium-induced porous layer formation in Silicon.
Year: 1987
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-107-449
Authors: A. Van Veen, C.C. Griffioen, J.H. Evans
Institutions: Delft University of Technology, Research Complex at Harwell
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2065624689