Influence of Annealing Temperature on the Properties of Zn-Sb Composite Thin Films by Magnetron Sputtering
Year: 2015
Type: article
Abstract: Zn-Sb based composite thin films have been prepared by radio frequency magnetron sputtering using a Zn4Sb3 compound target followed by thermal annealing. Sample structure and surface morphology were analyzed by X-ray diffraction (XRD) and atomic force microscopy (AFM). The electrical properties of the films were studied by Hall measurements. The X-ray diffraction patterns reveal that the intensity of diffraction peak of ZnSb phase is enhanced as temperature increasing. Results of AFM shows the rms roughness is getting big with increasing temperature due to the growing crystal grains. Hall measurements indicate that the Zn-Sb composite thin films annealed at different temperatures are p-type conducting with carrier concentrations being on the order of 1019 cm-3.
Source: Advanced materials research
Authors: Yu Huan Sun, Juan Qin, Guo Hua Wang, Wei Min Shi
Institution: Shanghai University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W2067652830