Work

Applications of optical beam-induced reflectance scans in silicon processing

Year: 1989

Type: article

Source: IEEE Journal of Quantum Electronics

DOI: 10.1109/3.28003

Authors: G.E. Carver, J.D. Michalski

Institution: AT&T (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2068810508

FWCI: 0.945

Cites: 41

Cited by: 4

Related to: 10