Work

Droplet-based photoresist deposition

Year: 2006

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.2191087

Author: Utkan Demirci

Institution: Stanford University

Language: English

Topic: Fluid Dynamics and Heat Transfer

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2068930323

FWCI: 0.772

Cites: 16

Cited by: 13

Related to: 10