Work

Comprehensive 3-D notching simulator with nonplanar substrates

Year: 1990

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.20198

Authors: Eytan Barouch, Brian D. Bradie, Uwe Hollerbach, George Karniadakis, Steven A. Orszag

Institutions: Clarkson University, Princeton University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2069101299

FWCI: 7.145

Cites:

Cited by: 11

Related to: 10