Work

Mechanical characterization of LiPON films using nanoindentation

Year: 2011

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2011.07.068

Authors: E.G. Herbert, W.E. Tenhaeff, N.J. Dudney, G.M. Pharr

Institutions: University of Tennessee at Knoxville, Oak Ridge National Laboratory

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: U.S. Department of Energy, Laboratory Directed Research and Development, Oak Ridge National Laboratory

OpenAlex ID: W2069727353

FWCI: 9.13

Cites: 15

Cited by: 170

Related to: 10