Work

Fabrication of micro-optical structures by applying negative tone hybrid glass materials and greyscale lithography

Year: 2002

Type: article

Source: Electronics Letters

DOI: 10.1049/el:20020032

Authors: A.H.O. Kärkkäinen, J.T. Rantala, M.R. Descour

Institutions: VTT Technical Research Centre of Finland, University of Arizona

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Academy of Finland

OpenAlex ID: W2070424200

FWCI: 2.451

Cites: 7

Cited by: 13

Related to: 10