Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization
Year: 2003
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.1618358
Authors: Alfred Grill, Deborah A. Neumayer
Institution: IBM Research - Thomas J. Watson Research Center
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2070611256