Work

Post-Fabrication Electrical Trimming of Silicon Bulk Acoustic Resonators using Joule Heating

Year: 2009

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2009.4805527

Authors: A.K. Samarao, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Georgia Institute of Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W2071501445

FWCI: 9.726

Cites: 10

Cited by: 21

Related to: 10