Low voltage electron beam lithography in self-assembled ultrathin films with the scanning tunneling microscope
Year: 1994
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.111157
Institution: United States Naval Research Laboratory
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2071702983