Microscale Features and Surface Chemical Functionality Patterned by Electron Beam Lithography: A Novel Route to Poly(dimethylsiloxane) (PDMS) Stamp Fabrication
Year: 2006
Type: article
Source: Langmuir
DOI: 10.1021/la060319i
Authors: Matthew T. Russell, Liam S. C. Pingree, Mark C. Hersam, Tobin J. Marks
Institution: Northwestern University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2071903236