Work

Demolding temperature in thermal nanoimprint lithography

Year: 2009

Type: article

Source: Applied Physics A

DOI: 10.1007/s00339-009-5224-0

Authors: Sunggook Park, Zhichao Song, Lance Brumfield, Alborz Amirsadeghi, Jaejong Lee

Institutions: Louisiana State University, Korea Institute of Machinery & Materials

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2072264922

FWCI: 1.202

Cites: 20

Cited by: 31

Related to: 10