Work

Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy

Year: 2003

Type: article

Source: Applied Surface Science

DOI: 10.1016/s0169-4332(03)00881-x

Authors: J Bonse, K.-W Brzezinka, A.J Meixner

Institutions: Consejo Superior de Investigaciones Científicas, Instituto de Óptica "Daza de Valdés", Federal Institute For Materials Research and Testing, University of Siegen

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2073354581

FWCI: 14.96

Cites: 49

Cited by: 250

Related to: 10