Finite Ground Coplanar Lines on CMOS Grade Silicon with a Thick Embedded Silicon Oxide Layer Using Micromachining Techniques
Year: 2003
Type: conference-paper
Authors: Guoan Wang, Andrew Bacon, Reza Abdolvand, Farrokh Ayazi, John Papapolymerou, Emmanouil M. Tentzeris
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2073886685
