Work

Ion distribution functions in an inductively coupled plasma

Year: 1995

Type: conference-paper

Source: IEEE International Conference on Plasma Science (ICOPS)

DOI: 10.1109/plasma.1995.531728

Authors: E.R. Keiter, W.N.G. Hitchon, V.I. Kolobov, K.M. Kramer

Institution: University of Wisconsin–Madison

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2074060423

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Cites: 1

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Related to: 10