Work

Diffraction phase microscopy for wafer inspection

Year: 2012

Type: conference-paper

Source: IEEE Photonics Conference

DOI: 10.1109/ipcon.2012.6358786

Authors: Renjie Zhou, Chris Edwards, Gabriel Popescu, Lynford L. Goddard

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Division of Chemical, Bioengineering, Environmental, and Transport Systems

OpenAlex ID: W2074120625

FWCI: 0.909

Cites: 5

Cited by: 8

Related to: 10