Work

Thin-film piezoelectric-on-substrate resonators with Q enhancement and TCF reduction

Year: 2010

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2010.5442303

Authors: Wanling Pan, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2074122205

FWCI: 18.4

Cites: 5

Cited by: 69

Related to: 10