Work

Surface plasmon assisted contact scheme nanoscale photolithography using an UV lamp

Year: 2008

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.2834688

Authors: Dongbing Shao, Shaochen Chen

Institution: The University of Texas at Austin

Language: English

Topic: Plasmonic and Surface Plasmon Research

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, University of Texas at Austin, Division of Civil, Mechanical and Manufacturing Innovation

OpenAlex ID: W2074330763

FWCI: 0.426

Cites: 18

Cited by: 14

Related to: 10