Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering
Year: 2002
Type: article
Source: Vacuum
Authors: Guojia Fang, Dejie Li, Bao-Lun Yao
Institution: Tsinghua University
Language: English
Topic: ZnO doping and properties
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Funder: Tsinghua University
OpenAlex ID: W2074362200