Work

A low-power optical electron switch

Year: 2014

Type: article

Abstract: An electron beam is deflected when it passes over a silicon-nitride surface, if the surface is illuminated by a low-power continuous-wave diode laser. A deflection angle of up to 1.2 mrad is achieved for an electron beam of 29 µ rad divergence. A mechanical beam-stop is used to demonstrate that the effect can act as an optical electron switch with a rise and fall time of 6 µ s. Such a switch provides an alternative means to control electron beams, which may be useful in electron lithography and microscopy.

Source: Journal of Physics D Applied Physics

DOI: 10.1088/0022-3727/47/8/085102

Authors: Wayne Cheng-Wei Huang, Roger Bach, Peter Beierle, Herman Batelaan

Institutions: Texas A&M University, University of Nebraska–Lincoln

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funder: National Science Foundation

Award: Coherent Electron Control