Work

Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film

Year: 2003

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2003.09.014

Authors: Yeon Sik Jung, Ji Yoon Seo, Dong Wook Lee, Duk Young Jeon

Institutions: Samsung (South Korea), Korea Advanced Institute of Science and Technology

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2075273154

FWCI: 6.704

Cites: 34

Cited by: 215

Related to: 10